Microsystem Design.pdf

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MICROSYSTEM DESIGN
ABOUT THE COVER
The author gratefully acknowledges the cover photograph by Felice Frankel,
Artist in Residence at the Massachusetts Institute of Technology and coauthor
of
On the Surface of Things: Images of the Extraordinary in Science.
This particular image, taken with Nomarski optics, presents a wafer-bonded
piezoresistive pressure sensor. It is fabricated in the sealed-cavity process
developed by Professor Martin Schmidt of the Massachusetts Institute of Tech-
nology with his graduate students, Lalitha Parameswaran and Charles Hsu.
The piezoresistors are clearly visible, and the slight contrast across the central
diaphragm region shows that the diaphragm is actually slightly bent by the
pressure difference between the ambient and the sealed cavity beneath.
MICROSYSTEM DESIGN
Stephen D. Senturia
Massachusetts Institute of Technology
KLUWER ACADEMIC PUBLISHERS
NEW YORK, BOSTON, DORDRECHT, LONDON, MOSCOW
eBook ISBN:
Print ISBN:
0-306-47601-0
0-7923-7246-8
©2002 Kluwer Academic Publishers
New York, Boston, Dordrecht, London, Moscow
Print ©2001
Kluwer Academic Publishers
Dordrecht
All rights reserved
No part of this eBook may be reproduced or transmitted in any form or by any means, electronic,
mechanical, recording, or otherwise, without written consent from the Publisher
Created in the United States of America
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